|Left: the original vacuum pump. Center: a 1663 third generation vacuum pump. Right: a semi-modern laboratory size scale version.|
The first vacuum pump was invented in circa 1650 by German engineer Otto Guericke, as shown adjacent.  The third design, supposedly, being more of a portable design, was built in 1663.
The following shows a "second generation" vacuum pump, the one shown constructed in Guericke’s private house in 1664, spanning from the cellar up to his office. 
● Engine development timeline
● Timeline of thermodynamics
1. (a) Wilson, George. (1849). “On the Early History of the Air-Pump in England”, The Edinburgh New Philosophical Journal, (pgs. 330-54).
(b) Galloway, Robert L. (1881). The Steam Engine and its Inventors. London: MacMillan and Co.
2. (a) The First Vacuum Pump – MK-Technology.com.
(b) Otto von Guericke and the Magdeburg Hemispheres – MK-Technology.com.
● Vacuum pump – Wikipedia.